000 00440nam a22001697a 4500
005 20240319130305.0
008 240319b |||||||| |||| 00| 0 eng d
020 _a978-93-5460-122-4
040 _cACEIT LIBRARY
100 _9488
_aKim Eun Sok
245 _aFundamentals of Microelectromechanical Systems (MEMS)
250 _a1st
260 _aNew Delhi
_bMGH
_c2021
300 _a396 P.
650 _xMechanical
942 _2ddc
_cBK
999 _c61024
_d61024